Product Introduction
Niobium targets play a key role in the reactive sputter deposition of niobium pentoxide (Nb₂O₅) films. Impurities in the sputtering target can directly impact the optical properties of the Nb₂O₅ film. To address this, high – purity sputtering – grade niobium is specially provided for applications requiring precise control over film quality, ensuring optimal performance in optical and related advanced manufacturing processes.
Core Advantages
- High Purity for Optical Applications: Strictly controlled impurity levels to safeguard the optical performance of Nb₂O₅ films, making it ideal for optical coating and semiconductor – related thin – film deposition.
- Dual – Grade Availability: Offered in sputtering grade (for high – precision needs) and commercial grade (for general industrial uses), catering to diverse market requirements.
Chemical Purity Specifications（ppm）
| Impurities (ppm) | Sputtering Grade Niobium | Commercial Grade Niobium |
| Fe | <20 | <100 |
| Ni | <25 | <50 |
| Cr | <5 | <10 |
| Cu | <5 | <10 |
| Zr | <50 | <200 |
| P | <30 | <30 |
| Si | <30 | <50 |
| Ta | <400 | <3000 |
| W | <50 | <500 |
| Mo | <50 | <800 |
| Na | <3 | <10 |
| Li | <5 | <10 |
| K | <3 | <10 |
| U | <0.1 | <10 |
| Th | <0.1 | <10 |
| Others | <10 | <10 |
| C | <40 | <100 |
| O | <150 | <200 |
| N | <100 | <100 |
| H | <15 | <15 |
Application Scenarios
- Optical Coating: Essential for depositing Nb₂O₅ films in optical devices such as anti – reflection coatings for lenses and optical filters, where impurity – free films are crucial for optical performance.
- Semiconductor Manufacturing: Used in thin – film processes for semiconductor components, contributing to the production of high – performance electronic devices.
- Advanced Materials Research: A valuable material for R & D in new thin – film technologies, enabling experiments with precise material properties.
Quality Assurance
Rigorous quality control measures are implemented to ensure that both sputtering grade and commercial grade niobium meet their respective purity standards. This ensures consistent performance in various applications, providing a reliable material solution for industries relying on niobium sputtering processes.